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1. Diffusion Furnace for solar cell
Furnace Chamber ID: Φ300mm
Range of temperature: 400∼1100oC
Length of Constant: ≤800mm±1oC (801∼1100oC
≤800mm±1.5oC (400∼800oC)
Temperature Stability of spot: ≤±1oC/4h
Rate of Temperature: up 15oC/min. down 5oC/min.
Feed form of wafer: 20∼500mm/min on boat with auto SiC-oar;
Located precision: ≤±10mm
carrying capacity: ≤10kg
Total power: ≤100KVA (3 tubes)
Overall dimension: 3200 (L) x 500 (w) x 300 (H)mm
Total Weight: 1500kg
2.Silicon Crystal Grower for solar ingot
Crystal silicon Size: 6- 8inchx 500mm up
Furnace Chamber ID: 800mm
Heating: Graphite resistant
Seed Rotation: 2-50rpm
Seed Lift Rate: 0.2-8mm/min
Crucible Rotation: 1-30rpm
Crucible Lift Rate: 0.02-1mm/min
3.Silicon Column Preparing Saw
Maximum cutting diameter of mono-crystalline silicon: Φ230mm
Minimum thickness of mono-crystalline silicon: 1mm
Size of saw belt: 4100x38x0.7mm
Feed speed of cutting: 0-20mm/min
Control mode:
Control by computer
Operation with touch screen
Maximum slot width of work piece: ≤0.8mm
Maximum cut length of work piece: ≤2000mm
Total power: 6KW
Weight: 2000kg
4.Multi Wire Saw for solar wafer
Rotational Speed of Wire Guide: 1300rpm max.
Service life of wire: one time
Wire diameter: Φ0.08mm-Φ0.18mm
Wire guide winding capacity: 30KGx coil
Wire tension: 35.0N-40.0N (step unit: 0.1N)
Wire speed: 500m/min. max.
To-and-fro times of wire: 15 times/min. (Max.)
Feed rate: 0-2mm/min.
Worktable speed: 300mm/min.
Worktable horizontal rotation angle: 0-±5 for readjustment of worktable)
Cut-in control of worktable: via wire deviation sensor
Machine weight: about 6,000kg
5. PECVD for solar cell
Wafer Size: 150mm
Deposition Film: Si3N4, Poly-Si, SiO2, PSG
Deposition Film Thickness: 1000∼6000? Process Temperature: 350∼1100oC
Range and Precision of Temperature Zone:
760mm≤±1oC
Loading Capacity: 25∼100pcs/tube
6.Squaring Saw for solar wafer
Diameter of work piece: 4, 6, 8 inch
Length of work piece: 50-500mm
Linear speed of grinding head: 22mm/s
Amount of feed of grinding head: 0.05-1.3mm
Diameter of diamond cutter: Φ450mm
Degree of symmetry: ≤0.08mm
Plainness: ≤0.08/300mm
Roundness: ≤0.05/400mm
Cylindricity: ≤0.05/400mm
Verticality: ≤0.08mm
Weight: 4000kg
Total power: 10.4KW
Packing:
Wooden case |
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